MOUNTING DEVICE AND METHOD

PROBLEM TO BE SOLVED: To provide a mounting device and method which enables at least one of the improvements of a yield, the reduction of the cost of the device, and the accuracy of alignment. SOLUTION: The mounting device for mounting an object on the predetermined position of a substrate is provid...

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Bibliographische Detailangaben
1. Verfasser: HAYASHI HIROOKI
Format: Patent
Sprache:eng
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