MOUNTING DEVICE AND METHOD
PROBLEM TO BE SOLVED: To provide a mounting device and method which enables at least one of the improvements of a yield, the reduction of the cost of the device, and the accuracy of alignment. SOLUTION: The mounting device for mounting an object on the predetermined position of a substrate is provid...
Gespeichert in:
1. Verfasser: | |
---|---|
Format: | Patent |
Sprache: | eng |
Schlagworte: | |
Online-Zugang: | Volltext bestellen |
Tags: |
Tag hinzufügen
Keine Tags, Fügen Sie den ersten Tag hinzu!
|
Zusammenfassung: | PROBLEM TO BE SOLVED: To provide a mounting device and method which enables at least one of the improvements of a yield, the reduction of the cost of the device, and the accuracy of alignment. SOLUTION: The mounting device for mounting an object on the predetermined position of a substrate is provided with a first supporting unit comprising a first supporting surface for supporting one surface of the object and a second supporting unit comprising a second supporting surface for supporting the different surface of the object. COPYRIGHT: (C)2004,JPO |
---|