METHOD AND APPARATUS FOR MANUFACTURING MAGNETIC RECORD MEDIUM

PROBLEM TO BE SOLVED: To achieve a manufacturing method of a magnetic recording medium and a manufacturing apparatus of the magnetic record medium, that can efficiently form a multilayer laminated magnetic film in a vertical medium with high medium performance. SOLUTION: By using a pallet conveyance...

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Hauptverfasser:	NEMOTO HIROAKI, HOSOE YUZURU, HIRAYAMA YOSHIYUKI, KOKADO YUICHI, HONDA YOSHINORI, YAKU YOTSUO, KATAOKA HIROYUKI
Format:	Patent
Sprache:	eng
Schlagworte:	CHEMICAL SURFACE TREATMENT CHEMISTRY COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATIONOR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY IONIMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL COATING MATERIAL WITH METALLIC MATERIAL COATING METALLIC MATERIAL DIFFUSION TREATMENT OF METALLIC MATERIAL INFORMATION STORAGE INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORDCARRIER AND TRANSDUCER INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION INGENERAL METALLURGY PHYSICS SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THESURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION
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Beschreibung
Zusammenfassung:	PROBLEM TO BE SOLVED: To achieve a manufacturing method of a magnetic recording medium and a manufacturing apparatus of the magnetic record medium, that can efficiently form a multilayer laminated magnetic film in a vertical medium with high medium performance. SOLUTION: By using a pallet conveyance type of film-forming system sputtering film-forming apparatus for mounting a substrate 11 to a pallet 12 for conveying, diverse targets 13, 14 are successively and repeatedly mounted to one cathode 15, thus forming an extremely thin multilayer laminated magnetic film. COPYRIGHT: (C)2004,JPO