INKJET HEAD, ITS MANUFACTURING METHOD, AND INKJET HEAD RECORDER

PROBLEM TO BE SOLVED: To provide an inkjet head having a nozzle plate arranged such that water repellent performance can be sustained by enhancing durability against wiping of a water repellent film formed on the surface of a nozzle forming member and a nozzle hole of deformed shape is eliminated by ensuring machinability of nozzle hole using excimer laser. SOLUTION: The inkjet head comprises a nozzle forming member 121 having a plurality of nozzle holes 44 for ejecting ink drops, and a plurality of ink liquid chambers each having a nozzle opening 127 communicating with each nozzle hole 44 wherein an ink drop is ejected from the nozzle hole 44 by driving an energy generating means corresponding to each nozzle hole 44 thereby varying the volume in the ink liquid chamber. Surface of the nozzle forming member 121 is coated with a fluorine based water repelling agent 123 and a thin SiO2film layer 122 is formed between the nozzle forming member 121 and the fluorine based water repelling agent 123. COPYRIGHT: (C)2004,JPO