PLASMA GENERATOR AND DEVICE FOR DETECTING DISCHARGE BETWEEN INSULATORS THEREOF

PROBLEM TO BE SOLVED: To provide a device for detecting discharge generated between insulators arranged in a plasma generating part to which microwave power is supplied. SOLUTION: In this plasma generator comprising an outside conductor 3 connected with a rectangular waveguide 1, an inside conductor...

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Bibliographische Detailangaben

1. Verfasser:	KASAI YOSHINOBU
Format:	Patent
Sprache:	eng
Schlagworte:	BASIC ELECTRIC ELEMENTS ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR ELECTRICITY PLASMA TECHNIQUE PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OFNEUTRONS PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMICBEAMS SEMICONDUCTOR DEVICES
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