PLASMA GENERATOR AND DEVICE FOR DETECTING DISCHARGE BETWEEN INSULATORS THEREOF

PROBLEM TO BE SOLVED: To provide a device for detecting discharge generated between insulators arranged in a plasma generating part to which microwave power is supplied. SOLUTION: In this plasma generator comprising an outside conductor 3 connected with a rectangular waveguide 1, an inside conductor 4 arranged inside the outside conductor, a cylindrical insulator 9 covering the inside conductor 4, and an insulator 5 for partitioning a space between inside of the rectangular waveguide 1 and the outside conductor, the cylindrical insulator 9 and the insulator 5 for partitioning are arranged so as to mutually abut each other. A temperature measurer 21 for measuring temperature of the insulator 5 is provided, and when increase rate of temperature measured by the temperature measurer 21 exceeds the determination reference value, generation of discharge between the insulators 5, 9 is detected. COPYRIGHT: (C)2004,JPO