PLASMA GENERATOR AND DEVICE FOR DETECTING DISCHARGE BETWEEN INSULATORS THEREOF
PROBLEM TO BE SOLVED: To provide a device for detecting discharge generated between insulators arranged in a plasma generating part to which microwave power is supplied. SOLUTION: In this plasma generator comprising an outside conductor 3 connected with a rectangular waveguide 1, an inside conductor...
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| creator | KASAI YOSHINOBU |
| description | PROBLEM TO BE SOLVED: To provide a device for detecting discharge generated between insulators arranged in a plasma generating part to which microwave power is supplied. SOLUTION: In this plasma generator comprising an outside conductor 3 connected with a rectangular waveguide 1, an inside conductor 4 arranged inside the outside conductor, a cylindrical insulator 9 covering the inside conductor 4, and an insulator 5 for partitioning a space between inside of the rectangular waveguide 1 and the outside conductor, the cylindrical insulator 9 and the insulator 5 for partitioning are arranged so as to mutually abut each other. A temperature measurer 21 for measuring temperature of the insulator 5 is provided, and when increase rate of temperature measured by the temperature measurer 21 exceeds the determination reference value, generation of discharge between the insulators 5, 9 is detected. COPYRIGHT: (C)2004,JPO |
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| fullrecord | <record><control><sourceid>epo_EVB</sourceid><recordid>TN_cdi_epo_espacenet_JP2003338400A</recordid><sourceformat>XML</sourceformat><sourcesystem>PC</sourcesystem><sourcerecordid>JP2003338400A</sourcerecordid><originalsourceid>FETCH-epo_espacenet_JP2003338400A3</originalsourceid><addsrcrecordid>eNqNi70KwjAURrs4iPoOF3chGAfXmHz5kZqW5FbHUiROooX6_qjgAzgdDpwzr2Jbq3xS5BCRFDeJVDRkcA4aZD9qwNAcoiMTsvYqOdABfAEihZi7-jtlYo-Exi6r2W24T2X146JaW7D2mzI--zKNw7U8yqs_tlshpJT7nRBK_hW9AWCvLtI</addsrcrecordid><sourcetype>Open Access Repository</sourcetype><iscdi>true</iscdi><recordtype>patent</recordtype></control><display><type>patent</type><title>PLASMA GENERATOR AND DEVICE FOR DETECTING DISCHARGE BETWEEN INSULATORS THEREOF</title><source>esp@cenet</source><creator>KASAI YOSHINOBU</creator><creatorcontrib>KASAI YOSHINOBU</creatorcontrib><description>PROBLEM TO BE SOLVED: To provide a device for detecting discharge generated between insulators arranged in a plasma generating part to which microwave power is supplied. SOLUTION: In this plasma generator comprising an outside conductor 3 connected with a rectangular waveguide 1, an inside conductor 4 arranged inside the outside conductor, a cylindrical insulator 9 covering the inside conductor 4, and an insulator 5 for partitioning a space between inside of the rectangular waveguide 1 and the outside conductor, the cylindrical insulator 9 and the insulator 5 for partitioning are arranged so as to mutually abut each other. A temperature measurer 21 for measuring temperature of the insulator 5 is provided, and when increase rate of temperature measured by the temperature measurer 21 exceeds the determination reference value, generation of discharge between the insulators 5, 9 is detected. COPYRIGHT: (C)2004,JPO</description><edition>7</edition><language>eng</language><subject>BASIC ELECTRIC ELEMENTS ; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ; ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR ; ELECTRICITY ; PLASMA TECHNIQUE ; PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OFNEUTRONS ; PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMICBEAMS ; SEMICONDUCTOR DEVICES</subject><creationdate>2003</creationdate><oa>free_for_read</oa><woscitedreferencessubscribed>false</woscitedreferencessubscribed></display><links><openurl>$$Topenurl_article</openurl><openurlfulltext>$$Topenurlfull_article</openurlfulltext><thumbnail>$$Tsyndetics_thumb_exl</thumbnail><linktohtml>$$Uhttps://worldwide.espacenet.com/publicationDetails/biblio?FT=D&date=20031128&DB=EPODOC&CC=JP&NR=2003338400A$$EHTML$$P50$$Gepo$$Hfree_for_read</linktohtml><link.rule.ids>230,308,776,881,25543,76293</link.rule.ids><linktorsrc>$$Uhttps://worldwide.espacenet.com/publicationDetails/biblio?FT=D&date=20031128&DB=EPODOC&CC=JP&NR=2003338400A$$EView_record_in_European_Patent_Office$$FView_record_in_$$GEuropean_Patent_Office$$Hfree_for_read</linktorsrc></links><search><creatorcontrib>KASAI YOSHINOBU</creatorcontrib><title>PLASMA GENERATOR AND DEVICE FOR DETECTING DISCHARGE BETWEEN INSULATORS THEREOF</title><description>PROBLEM TO BE SOLVED: To provide a device for detecting discharge generated between insulators arranged in a plasma generating part to which microwave power is supplied. SOLUTION: In this plasma generator comprising an outside conductor 3 connected with a rectangular waveguide 1, an inside conductor 4 arranged inside the outside conductor, a cylindrical insulator 9 covering the inside conductor 4, and an insulator 5 for partitioning a space between inside of the rectangular waveguide 1 and the outside conductor, the cylindrical insulator 9 and the insulator 5 for partitioning are arranged so as to mutually abut each other. A temperature measurer 21 for measuring temperature of the insulator 5 is provided, and when increase rate of temperature measured by the temperature measurer 21 exceeds the determination reference value, generation of discharge between the insulators 5, 9 is detected. COPYRIGHT: (C)2004,JPO</description><subject>BASIC ELECTRIC ELEMENTS</subject><subject>ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR</subject><subject>ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR</subject><subject>ELECTRICITY</subject><subject>PLASMA TECHNIQUE</subject><subject>PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OFNEUTRONS</subject><subject>PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMICBEAMS</subject><subject>SEMICONDUCTOR DEVICES</subject><fulltext>true</fulltext><rsrctype>patent</rsrctype><creationdate>2003</creationdate><recordtype>patent</recordtype><sourceid>EVB</sourceid><recordid>eNqNi70KwjAURrs4iPoOF3chGAfXmHz5kZqW5FbHUiROooX6_qjgAzgdDpwzr2Jbq3xS5BCRFDeJVDRkcA4aZD9qwNAcoiMTsvYqOdABfAEihZi7-jtlYo-Exi6r2W24T2X146JaW7D2mzI--zKNw7U8yqs_tlshpJT7nRBK_hW9AWCvLtI</recordid><startdate>20031128</startdate><enddate>20031128</enddate><creator>KASAI YOSHINOBU</creator><scope>EVB</scope></search><sort><creationdate>20031128</creationdate><title>PLASMA GENERATOR AND DEVICE FOR DETECTING DISCHARGE BETWEEN INSULATORS THEREOF</title><author>KASAI YOSHINOBU</author></sort><facets><frbrtype>5</frbrtype><frbrgroupid>cdi_FETCH-epo_espacenet_JP2003338400A3</frbrgroupid><rsrctype>patents</rsrctype><prefilter>patents</prefilter><language>eng</language><creationdate>2003</creationdate><topic>BASIC ELECTRIC ELEMENTS</topic><topic>ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR</topic><topic>ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR</topic><topic>ELECTRICITY</topic><topic>PLASMA TECHNIQUE</topic><topic>PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OFNEUTRONS</topic><topic>PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMICBEAMS</topic><topic>SEMICONDUCTOR DEVICES</topic><toplevel>online_resources</toplevel><creatorcontrib>KASAI YOSHINOBU</creatorcontrib><collection>esp@cenet</collection></facets><delivery><delcategory>Remote Search Resource</delcategory><fulltext>fulltext_linktorsrc</fulltext></delivery><addata><au>KASAI YOSHINOBU</au><format>patent</format><genre>patent</genre><ristype>GEN</ristype><title>PLASMA GENERATOR AND DEVICE FOR DETECTING DISCHARGE BETWEEN INSULATORS THEREOF</title><date>2003-11-28</date><risdate>2003</risdate><abstract>PROBLEM TO BE SOLVED: To provide a device for detecting discharge generated between insulators arranged in a plasma generating part to which microwave power is supplied. SOLUTION: In this plasma generator comprising an outside conductor 3 connected with a rectangular waveguide 1, an inside conductor 4 arranged inside the outside conductor, a cylindrical insulator 9 covering the inside conductor 4, and an insulator 5 for partitioning a space between inside of the rectangular waveguide 1 and the outside conductor, the cylindrical insulator 9 and the insulator 5 for partitioning are arranged so as to mutually abut each other. A temperature measurer 21 for measuring temperature of the insulator 5 is provided, and when increase rate of temperature measured by the temperature measurer 21 exceeds the determination reference value, generation of discharge between the insulators 5, 9 is detected. COPYRIGHT: (C)2004,JPO</abstract><edition>7</edition><oa>free_for_read</oa></addata></record> |
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| subjects | BASIC ELECTRIC ELEMENTS ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR ELECTRICITY PLASMA TECHNIQUE PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OFNEUTRONS PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMICBEAMS SEMICONDUCTOR DEVICES |
| title | PLASMA GENERATOR AND DEVICE FOR DETECTING DISCHARGE BETWEEN INSULATORS THEREOF |
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