BOLOMETRIC INFRARED DETECTOR AND ITS MANUFACTURING METHOD

PROBLEM TO BE SOLVED: To provide a bolometric infrared detector and a manufacturing method for the bolometric infrared detector that keep a high-speed response and high sensitivity, and at the same time can increase the bandwidth of a detection wavelength. SOLUTION: The bolometric infrared detector...

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Bibliographische Detailangaben
Hauptverfasser:	KANEDA OSAMU, NAKAGI YOSHIYUKI
Format:	Patent
Sprache:	eng
Schlagworte:	BASIC ELECTRIC ELEMENTS COLORIMETRY ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT,POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRA-RED,VISIBLE OR ULTRA-VIOLET LIGHT MEASURING PHYSICS RADIATION PYROMETRY SEMICONDUCTOR DEVICES TESTING
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Beschreibung
Zusammenfassung:	PROBLEM TO BE SOLVED: To provide a bolometric infrared detector and a manufacturing method for the bolometric infrared detector that keep a high-speed response and high sensitivity, and at the same time can increase the bandwidth of a detection wavelength. SOLUTION: The bolometric infrared detector 10 comprises: a substrate 1; an infrared ray absorption layer 13 that is supported at a specific height position while being separated by a void from the substrate 1; a reflection layer 3 provided on the substrate 1; or the like. The infrared ray absorption layer 13 has an irregular sectional shape, flat sections 13a and 13b in parallel with the reflection layer 3, and a slanting section 13c that is not in parallel with the reflection layer 3. COPYRIGHT: (C)2004,JPO