WATER FEEDING METHOD AND WATER FEEDING APPARATUS

PROBLEM TO BE SOLVED: To provide a water feeding method and apparatus in which efficiency is improved and costs are reduced by improving a capability of releasing/ removing an unwanted object such as resist film. SOLUTION: The water feeding method for feeding water to a target in order to perform tr...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	TAJIMA KAORI, YAMAGUCHI RYUTA, SAGANE YOICHI, KOBAYASHI NAOAKI, ORI KOSUKE, NOJIRI KAZUO
Format:	Patent
Sprache:	eng
Schlagworte:	BASIC ELECTRIC ELEMENTS CLEANING CLEANING IN GENERAL ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY PERFORMING OPERATIONS PREVENTION OF FOULING IN GENERAL SEMICONDUCTOR DEVICES TRANSPORTING
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