WATER FEEDING METHOD AND WATER FEEDING APPARATUS

PROBLEM TO BE SOLVED: To provide a water feeding method and apparatus in which efficiency is improved and costs are reduced by improving a capability of releasing/ removing an unwanted object such as resist film. SOLUTION: The water feeding method for feeding water to a target in order to perform tr...

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Bibliographische Detailangaben
Hauptverfasser:	TAJIMA KAORI, YAMAGUCHI RYUTA, SAGANE YOICHI, KOBAYASHI NAOAKI, ORI KOSUKE, NOJIRI KAZUO
Format:	Patent
Sprache:	eng
Schlagworte:	BASIC ELECTRIC ELEMENTS CLEANING CLEANING IN GENERAL ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY PERFORMING OPERATIONS PREVENTION OF FOULING IN GENERAL SEMICONDUCTOR DEVICES TRANSPORTING
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Beschreibung
Zusammenfassung:	PROBLEM TO BE SOLVED: To provide a water feeding method and apparatus in which efficiency is improved and costs are reduced by improving a capability of releasing/ removing an unwanted object such as resist film. SOLUTION: The water feeding method for feeding water to a target in order to perform treatment including any one of cleaning, releasing and working of the target is provided with a dry steam generating step for generating dry steam from the water and a blowing step for blowing the dry steam (1) or a mixture (2) of the dry steam and mist from a nozzle onto a plate-like target treatment surface of the target. COPYRIGHT: (C)2004,JPO