APPARATUS AND METHOD FOR EXPOSING MASTER DISK OF OPTICAL DISK, AND METHOD FOR DETECTING ROTATION DEFLECTION

PROBLEM TO BE SOLVED: To obtain a track pitch of concentric-circular or spiral beam irradiation track which is never affected by the synchronous/asynchronous rotation deflection of a turntable by precisely detecting true rotation synchronization components and a synchronous rotation components and adjusting a beam irradiation position in a radial direction on the master disk of an optical disk by a beam irradiation position control means. SOLUTION: This exposing apparatus is provided with: an SP motor 113 for driving a turntable 112; an SL motor 120 for coarsely/finely moving the turntable 112 in a horizontal direction; an SP/SL motor controller 125 for controlling the SP motor 113 and the SL motor 120; a synchronous/asynchronous rotation deflection quantity detector 130a (130b) for detecting the sum of a synchronous rotation deflection quantity and an asynchronous rotation deflection quantity depending on the number of rotation of the turntable 112; and an electronic beam irradiation position controller 135 for adjusting the irradiation position of exposing beams to the master disk 111 of the optical disk based on the signal of the detector 130a (130b). COPYRIGHT: (C)2004,JPO