OXIDE SEMICONDUCTOR GAS SENSOR AND SUBSTANCE THEREFOR
PROBLEM TO BE SOLVED: To improve the selectivity of the response of a resistance gas sensor to a specific gas or water vapor. SOLUTION: Improvement is made by selecting a specific gas detection substance which has not be known heretofore. As applications, the following items are cited: hydrocarbon i...
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Zusammenfassung: | PROBLEM TO BE SOLVED: To improve the selectivity of the response of a resistance gas sensor to a specific gas or water vapor. SOLUTION: Improvement is made by selecting a specific gas detection substance which has not be known heretofore. As applications, the following items are cited: hydrocarbon in the presence of CO, H2S, SO2, chlorine, NO2, CO2(particularly, a low concentration), CFC, ammonia, free oxygen by measurement of partial pressure, and a variety of organic substance gases or vapors. COPYRIGHT: (C)2004,JPO |
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