METHOD FOR MEASURING RELATIVE POSITION OF FIRST IMAGING DEVICE AND SECOND IMAGING DEVICE

PROBLEM TO BE SOLVED: To determine the relative position of a first imaging device and a second imaging device by a simple method. SOLUTION: A group of mutually different reference patterns 16 and a basic pattern 18 are imaged by the second imaging device functioning as a master and each reference p...

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Bibliographische Detailangaben
Hauptverfasser: ZINTZEN BERNHARD, KOEHLER THOMAS
Format: Patent
Sprache:eng
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Zusammenfassung:PROBLEM TO BE SOLVED: To determine the relative position of a first imaging device and a second imaging device by a simple method. SOLUTION: A group of mutually different reference patterns 16 and a basic pattern 18 are imaged by the second imaging device functioning as a master and each reference pattern 16 of the group is assigned uniquely to one relative position at the time. At least one test pattern is imaged over the basic pattern by the first imaging device whose relative position is to be measured and thus a combination pattern 24 is formed. The reference pattern 16 of the group having an area coverage coinciding with the area coverage of the combination pattern 24 is identified. Since one relative position is assigned uniquely to the identified reference pattern 16 of the group, the relative position of the first imaging device and the second imaging device is identified. COPYRIGHT: (C)2004,JPO