SEMICONDUCTOR DISK PROCESSING APPARATUS AND METHOD OF OPERATING THE SAME

PROBLEM TO BE SOLVED: To provide a selective means that is standardized and easily read for its code expression of a loading unit of a processing apparatus installed in an on-site floor of manufacturing semiconductor products. SOLUTION: A semiconductor manufacturing apparatus (1) is provided with a...

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Hauptverfasser:	KUBART GREGOR, HOCKE CHRISTOPH, LERING MICHAEL
Format:	Patent
Sprache:	eng
Schlagworte:	BASIC ELECTRIC ELEMENTS CONVEYING ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY HANDLING THIN OR FILAMENTARY MATERIAL PACKING PERFORMING OPERATIONS PNEUMATIC TUBE CONVEYORS SEMICONDUCTOR DEVICES SHOP CONVEYOR SYSTEMS STORING TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING ORTIPPING TRANSPORTING
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Beschreibung
Zusammenfassung:	PROBLEM TO BE SOLVED: To provide a selective means that is standardized and easily read for its code expression of a loading unit of a processing apparatus installed in an on-site floor of manufacturing semiconductor products. SOLUTION: A semiconductor manufacturing apparatus (1) is provided with a load port (2) in which a discrimination code, which is readable by an optical means or an electromagnetic means, is stored. A transport device (4) is a container that can communicate with the load port, or is a transport means that transports such a container, and is provided with a read-in device (5) that responds to identify the code. As a consequence, flexible position alignment in a manufacturing site becomes possible. COPYRIGHT: (C)2004,JPO