FERROELECTRIC LAYER AND MANUFACTURING METHOD, AND FERROELECTRIC CAPACITOR AND PIEZOELECTRIC DEVICE

PROBLEM TO BE SOLVED: To provide a manufacturing method of a ferroelectric layer for improving surface morphology where the surface morphology is improved, a ferroelectric memory device and a piezoelectric device where the ferroelectric layer is applied. SOLUTION: The manufacturing method of the fer...

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1. Verfasser:	SAWAZAKI TATSUO
Format:	Patent
Sprache:	eng
Schlagworte:	ARTIFICIAL STONE BASIC ELECTRIC ELEMENTS CEMENTS CERAMICS CHEMISTRY COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDINGMATERIALS CONCRETE ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY LIME, MAGNESIA METALLURGY REFRACTORIES SEMICONDUCTOR DEVICES SLAG TREATMENT OF NATURAL STONE
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Zusammenfassung:	PROBLEM TO BE SOLVED: To provide a manufacturing method of a ferroelectric layer for improving surface morphology where the surface morphology is improved, a ferroelectric memory device and a piezoelectric device where the ferroelectric layer is applied. SOLUTION: The manufacturing method of the ferroelectric layer comprises steps of (a) forming a ferroelectric film 20, and (b) forming an embedded insulating film 30 on the ferroelectric film 20. The step (b) includes a step of stacking a raw material liquid layer 32 on the ferroelectric film 20 by turning raw material liquid for the embedded insulating film into mist. COPYRIGHT: (C)2004,JPO