GRADIENT MECHANISM OF SAMPLE STAGE IN CHARGED PARTICLE MICROSCOPE PROVIDED WITH PERIPHERAL DEVICE

PROBLEM TO BE SOLVED: To provide a mechanism in which gradient driving of a sample stage does not influence on other peripheral devices such as a photoelectron microscope or the like installed in combination, in a charged particle microscope provided with the sample stage having the gradient function. SOLUTION: The charged particle microscope has a rotating support part of the gradient mechanism placed on the side wall of the vacuum chamber in the sample stage having the gradient mechanism, and at least detecting parts of the optical microscope, a laser scattering microscope, and other peripheral devices such as an optical height detection system or the like installed in combination are mounted on the rotating support part inside the chamber, and members which can be moved together with the rotating shaft of the gradient mechanism and which cannot be arranged within the vacuum are installed at the outer side of the chamber. COPYRIGHT: (C)2004,JPO