DISCHARGE PLASMA PROCESSING DEVICE

PROBLEM TO BE SOLVED: To provide a discharge plasma processing device using plate electrodes capable of fixing a workpiece between the electrodes for uniformly processing it and restraining generation of the arc discharge. SOLUTION: In this plasma processing device, an electric field is impressed be...

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Bibliographische Detailangaben
1. Verfasser:	MIZUOCHI HIROYUKI
Format:	Patent
Sprache:	eng
Schlagworte:	AFTER-TREATMENT NOT COVERED BY SUBCLASSES C08B, C08C, C08F,C08G CHEMICAL SURFACE TREATMENT CHEMISTRY COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATIONOR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY IONIMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL COATING MATERIAL WITH METALLIC MATERIAL COATING METALLIC MATERIAL COMPOSITIONS BASED THEREON DIFFUSION TREATMENT OF METALLIC MATERIAL ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR ELECTRICITY GENERAL PROCESSES OF COMPOUNDING INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION INGENERAL METALLURGY ORGANIC MACROMOLECULAR COMPOUNDS PLASMA TECHNIQUE PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OFNEUTRONS PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMICBEAMS SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THESURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION THEIR PREPARATION OR CHEMICAL WORKING-UP WORKING-UP
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Beschreibung
Zusammenfassung:	PROBLEM TO BE SOLVED: To provide a discharge plasma processing device using plate electrodes capable of fixing a workpiece between the electrodes for uniformly processing it and restraining generation of the arc discharge. SOLUTION: In this plasma processing device, an electric field is impressed between a pair of opposed plate electrodes under a pressure close to an atmospheric pressure, and a glow discharge plasma is generated for processing the workpiece arranged between the electrodes. In this plasma processing device, at least one plate electrode is provided with a plurality of holes, into which solid dielectric pipes are inserted, and the discharge face side is coated with a solid dielectric body. COPYRIGHT: (C)2003,JPO