DISPLAY DEVICE MANUFACTURING METHOD AND DISPLAY DEVICE
PROBLEM TO BE SOLVED: To provide a method of manufacturing a display device having superior mass-productivity and improved long-term reliability by enabling the formation of an upper electrode preventing damage to an organic layer and the display device. SOLUTION: The method of manufacturing the upp...
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Zusammenfassung: | PROBLEM TO BE SOLVED: To provide a method of manufacturing a display device having superior mass-productivity and improved long-term reliability by enabling the formation of an upper electrode preventing damage to an organic layer and the display device. SOLUTION: The method of manufacturing the upper surface emitting display device 1 having a lower electrode 4, the organic layer 5 containing a luminous layer and the upper electrode 6 laminated sequentially on a substrate 2 for taking the emitted light out of the upper electrode side 6 comprises forming the lower electrode 4 on the substrate 2, forming the organic layer 5 containing the luminous layer on the lower electrode 4, and then forming the upper electrode 6 of a deposition thickness of 7 nm to 21 nm as a cathode containing lithium on the organic layer 5 by sputtering. The upper electrode 6 has a lithium composition ratio of 0.1 wt.% to 1.9 wt.%. The formation of the upper electrode 6 by sputtering is carried out at a deposition rate of 50 nm/min or lower. COPYRIGHT: (C)2003,JPO |
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