SEMICONDUCTOR MANUFACTURING APPARATUS AND MAINTENANCE METHOD

PROBLEM TO BE SOLVED: To provide a semiconductor manufacturing apparatus and a maintenance method capable of easily conducting the maintenance of the apparatus. SOLUTION: The apparatus is provided with a semiconductor treatment device 1 formed by modularizing a load lock chamber, a conveying chamber...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	WATABE TSUYOSHI, YAMAGISHI TAKAYUKI, SUWADA MASAE
Format:	Patent
Sprache:	eng
Schlagworte:	BASIC ELECTRIC ELEMENTS ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY SEMICONDUCTOR DEVICES
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