MASK-LOADING APPARATUS AND MASK-LOADING METHOD
PROBLEM TO BE SOLVED: To provide a mask-loading apparatus which can optimally load a mask on a panel. SOLUTION: When a mask M provided with elastic plates M3, having a hole M3a for engaging with one of panel pins Pa, is loaded on the panel P provided with panel pins Pa, each position of the panel pi...
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| Zusammenfassung: | PROBLEM TO BE SOLVED: To provide a mask-loading apparatus which can optimally load a mask on a panel. SOLUTION: When a mask M provided with elastic plates M3, having a hole M3a for engaging with one of panel pins Pa, is loaded on the panel P provided with panel pins Pa, each position of the panel pins Pa is detected, and the elastic deformation amount for each elastic plate M3 is adjusted, depending on the detected result. COPYRIGHT: (C)2003,JPO |
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