PROCESSING DEVICE OF DIELECTRIC FILM AND METHOD FOR PROCESSING THE DIELECTRIC FILM

PROBLEM TO BE SOLVED: To form a ferroelectric film with highly orientational property, improve electric characteristic and smoothen the surface of the ferroelectric formed by laser annealing. SOLUTION: A laser light L is given to the ferroelectric film 7 in an atmospheric gas of below atmospheric pressure. Or, after the dielectric film is heated in the atmospheric gas of below atmospheric pressure, the laser light L is given to it. Or, after a laser light L1 of comparatively low energy density is given thereto, a laser light L2 of comparatively high energy density is given thereto. COPYRIGHT: (C)2003,JPO