METHOD OF DETECTING DATUM POSITION OF TARGET HOLE IN IMIDE RESIN FILM

PROBLEM TO BE SOLVED: To provide a method of detecting a datum position of a target hole in an imide resin film, which can detect the datum position of the target hole made in the imide resin film from a binary image. SOLUTION: Based on the fact that only the blue beams whose center wave ranges from 450 to 500 nm are much absorbed in a work 100 made from the imide resin film, a beam is radiated from an illumination 4 which radiates a blue beam whose center wave ranges from 400 nm to 500 nm to an area including the target hole 100, and the image is picked up by the imaging section 12, which is arranged on the side opposite to the illumination 4 with the work 100 between them. The datum position of the target hole is detected by processing the image. Through this constitution, the density contrast required for binarization in the relation between the target hole 100 and the work 100 made from the imide resin film around the target hole 100 is obtained. COPYRIGHT: (C)2003,JPO