METHOD OF USING GALLIUM ION SOURCE

METHOD OF USING GALLIUM ION SOURCE

PROBLEM TO BE SOLVED: To prolong the service life of a gallium ion source mounted on a device by improving a method of using the gallium ion source. SOLUTION: A gallium ion source comprises a storage part for storing gallium, a needle-like electrode allowing gallium to be fed from the storage part t...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser: TERUI YOSHINORI, KUDO NAOYA
Format: Patent
Sprache:eng
Schlagworte:
BASIC ELECTRIC ELEMENTS
ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
ELECTRICITY
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Beschreibung
Zusammenfassung:PROBLEM TO BE SOLVED: To prolong the service life of a gallium ion source mounted on a device by improving a method of using the gallium ion source. SOLUTION: A gallium ion source comprises a storage part for storing gallium, a needle-like electrode allowing gallium to be fed from the storage part thereto, and a heating part for heating the storage part and the needle-like electrode. This method of using the gallium ion source comprises the step of terminating a flushing when the gallium ion source reaches a thermal equilibrium in flushing operation. COPYRIGHT: (C)2003,JPO