MINUTE DISPLACEMENT DEVICE

PROBLEM TO BE SOLVED: To solve a problem of a minute displacement device having a mobile part moving in nearly parallel in the direction of action of a piezoelectric actuator and a displacement enlarging part arranged on one plate, in which coupling parts of a force point and of a supporting point interfere each other, so that the desired lever ratio is not obtained and particularly a displacement part in a Z direction cannot be made thin. SOLUTION: A fixed part 35 and the mobile part 36 are coupled by flexible beams of parallel flat plates 41a and 41b. The displacement enlarging part 37 is coupled between the fixed part and the mobile part by a coupling part 42 at the application point and the coupling part 43 at the supporting point. A connecting fixed part 46 is connected to the fixed part 35, and a coupling enlarging part 49 is coupled with the displacement enlarging part 37. The force point is made by attaching the tip of an adjustable screw 7 screwed into the bend 49a of the connecting enlarging part to the piezoelectric actuator 50 to which the connecting fixed part is fixed at one end. The force point and the supporting point coupling part 43 arranged in the vicinity but on different plates displaces the mobile part in a direction Fz via the coupling part 42 according to the displacement of the force point in a Fy direction. COPYRIGHT: (C)2003,JPO