DUST REMOVING AIR SHOWER SYSTEM

PROBLEM TO BE SOLVED: To provide a dust removing air shower system that is usable without causing a fault in electric equipment 5 even in a site subjected to not only generation of a larger amount of dust but also high temperature. SOLUTION: An air supply circuit 2 for supplying compressed air and a...

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Bibliographische Detailangaben
Hauptverfasser: KOBAYASHI KIICHI, SAWASHIMA KENICHI, IMON AKIHIRO
Format: Patent
Sprache:eng
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Zusammenfassung:PROBLEM TO BE SOLVED: To provide a dust removing air shower system that is usable without causing a fault in electric equipment 5 even in a site subjected to not only generation of a larger amount of dust but also high temperature. SOLUTION: An air supply circuit 2 for supplying compressed air and an exhaust circuit 3 for discharging compressed air and dust are connected to an air shower room 1 with a doorway. The air supply circuit 2 has a filter. The exhaust circuit 3 is connected to a dust remover 4. The electric equipment 5 is installed inside or outside the air shower room 1. To a part of the air supply circuit 2, a heat dissipation circuit 6 is connected for supplying the electric equipment 5 with air of a temperature lower than the ambient temperature thereof. COPYRIGHT: (C)2003,JPO