METHOD FOR MANUFACTURING MULTILAYER PIEZOELECTRIC CERAMIC ELEMENT
PROBLEM TO BE SOLVED: To provide a method for manufacturing a piezoelectric ceramic element having excellent piezoelectric characteristics and showing high reliability. SOLUTION: The method includes: a process of applying a conductive paste containing an alloy essentially comprising Ag on a ceramic...
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Zusammenfassung: | PROBLEM TO BE SOLVED: To provide a method for manufacturing a piezoelectric ceramic element having excellent piezoelectric characteristics and showing high reliability. SOLUTION: The method includes: a process of applying a conductive paste containing an alloy essentially comprising Ag on a ceramic green sheet of a piezoelectric ceramic material containing a compound of Pb element and stacking the ceramic green sheets to form a layered body; and a process of calcining the layered body in an atmosphere having ≥21 vol.% of the oxygen concentration in the temperature elevating stage and the temperature holding stage during calcination and 0.05 to 3 vol.% of the oxygen concentration in the temperature decreasing stage. COPYRIGHT: (C)2003,JPO |
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