SURFACE INSPECTION DEVICE AND METHOD THEREFOR

PROBLEM TO BE SOLVED: To avoid exerting the effect of the surface color of an inspection object on automatic focusing even in a case performing focusing due to automatic focusing at the time of surface inspection. SOLUTION: The surface inspection device is equipped with an image pickup means 18 for picking up the surface image of a semiconductor substrate plate 30 to be inspected, a first illumination means 11 for emitting illumination light required in the pickup of the surface image, a second illumination means 21 for emitting illumination light separate from that of the first illumination means 11, and automatic focusing means 23, 24 and 25 for performing the focusing of the image pickup means 18 on the basis of the reflected light of the light emitted from the second illumination means 20. A waveform variable means 19 for varying the wavelength of synthetic light applied to the surface of the semiconductor substrate plate by the first and the second illumination means 11 and 21 is provided. COPYRIGHT: (C)2003,JPO