THIN-FILM PIEZOELECTRIC ELEMENT AND ITS MANUFACTURING METHOD

PROBLEM TO BE SOLVED: To provide a thin-film piezoelectric element which has a small leak current between electrode metal films and its manufacturing method. SOLUTION: The thin-film piezoelectric element has a thin-film piezoelectric body having 1st and 2nd surfaces facing each other and at least on...

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Bibliographische Detailangaben
Hauptverfasser:	UCHIYAMA HIROICHI, KITA HIROYUKI
Format:	Patent
Sprache:	eng
Schlagworte:	ELECTRICITY INFORMATION STORAGE INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORDCARRIER AND TRANSDUCER MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICALDEVICES MICROSTRUCTURAL TECHNOLOGY PERFORMING OPERATIONS PHYSICS PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTUREOR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS TRANSPORTING
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Beschreibung
Zusammenfassung:	PROBLEM TO BE SOLVED: To provide a thin-film piezoelectric element which has a small leak current between electrode metal films and its manufacturing method. SOLUTION: The thin-film piezoelectric element has a thin-film piezoelectric body having 1st and 2nd surfaces facing each other and at least one unit laminated body composed of a 1st electrode metal film on its 1st surface and a 2nd electrode metal film on its 2nd surface, and is provided with an electrode separation surface formed of a thin-film piezoelectric body surface parallel to the 1st surface between the 1st and 2nd electrode metal films. COPYRIGHT: (C)2003,JPO