LOADING AND UNLOADING STATION FOR SEMICONDUCTOR PROCESSING APPARATUS

PROBLEM TO BE SOLVED: To guarantee loading of disks into a semiconductor processing apparatus from a transfer container under a clean room condition. SOLUTION: A loading and unloading station for semiconductor processing apparatus is provided with a closable opening for loading and can load, unload,...

Ausführliche Beschreibung

Gespeichert in:

Bibliographische Detailangaben
Hauptverfasser:	MAGES ANDREAS, BLASCHITZ HERBERT, SCHELER WERNER, SCHNEIDER HEINZ, SCHULZ ALFRED
Format:	Patent
Sprache:	eng
Schlagworte:	ACCESSORIES, CLOSURES, OR FITTINGS THEREFOR BASIC ELECTRIC ELEMENTS CONTAINERS FOR STORAGE OR TRANSPORT OF ARTICLES OR MATERIALS,e.g. BAGS, BARRELS, BOTTLES, BOXES, CANS, CARTONS, CRATES,DRUMS, JARS, TANKS, HOPPERS, FORWARDING CONTAINERS CONVEYING ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY HANDLING THIN OR FILAMENTARY MATERIAL PACKAGES PACKAGING ELEMENTS PACKING PERFORMING OPERATIONS PNEUMATIC TUBE CONVEYORS SEMICONDUCTOR DEVICES SHOP CONVEYOR SYSTEMS STORING TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING ORTIPPING TRANSPORTING
Online-Zugang:	Volltext bestellen
Tags:	Tag hinzufügen Keine Tags, Fügen Sie den ersten Tag hinzu!

Beschreibung
Zusammenfassung:	PROBLEM TO BE SOLVED: To guarantee loading of disks into a semiconductor processing apparatus from a transfer container under a clean room condition. SOLUTION: A loading and unloading station for semiconductor processing apparatus is provided with a closable opening for loading and can load, unload, and reload the disks contained in the transfer container 6 into, from, and into the semiconductor processing apparatus through the opening, after a closure 12 is removed. The container 6 is provided with a container cover 15 which is extended in a direction nearly perpendicular to a flat loading and unloading surface 10. The container 6 is fixed to the closure 12 by frictional engagement through the cover 15, and the simultaneous opening of the opening and container 6 is performed by lowering the cover 15 into the semiconductor processing apparatus together with the closure 12. The loading and unloading of the disk are performed by locking a manipulator 22 provided in the processing apparatus in the container 6 through the opening. COPYRIGHT: (C)2003,JPO