FLUID SAMPLING DEVICE AND ANALYZER PROVIDED THEREWITH

PROBLEM TO BE SOLVED: To provide a sampling device that samples a step fluid used for a step for manufacturing a semiconductor device at a plurality of measuring points, and a fluid analyzer provided therewith. SOLUTION: This sampling device 100 is provided with a first nozzle assembly 102 comprising a plurality of flow-out nozzles 104. The flow-out nozzles 104 are connected with a line for providing a material fluid. A second nozzle assembly 112 arranged on the upper side of the first nozzle assembly 102 is provided with a flow-in nozzle 114 connected with a device for measuring the degree of contamination of the material fluid. A motor connected with the second nozzle assembly 112 matches the central axis of any one selected from the flow-out nozzles 104 with that of the flow-in nozzle 114. In addition, a pneumatic cylinder 158 connected with the first nozzle assembly 102 connects the flow-out nozzle 104 and flow-in nozzle 114 with each other whose central axes are aligned. Therefore, the degree of contamination of the material fluid obtained from a plurality of measuring points can be measured by one measuring device. COPYRIGHT: (C)2003,JPO