OVEN
PROBLEM TO BE SOLVED: To provide an oven which can raise temperature of a treated object to a prescribed value in a short time and yet does not cause contamination of atmosphere inside the oven due to degasification or the like. SOLUTION: A quartz tube heater 10 is provided arranged in a sealed oven...
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Format: | Patent |
Sprache: | eng |
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Zusammenfassung: | PROBLEM TO BE SOLVED: To provide an oven which can raise temperature of a treated object to a prescribed value in a short time and yet does not cause contamination of atmosphere inside the oven due to degasification or the like. SOLUTION: A quartz tube heater 10 is provided arranged in a sealed oven room 6, and is cantilever supported by a rear wall 4 of the oven room 6 so that a terminal part 13 is located outside the oven room. Further, a reflective body 11 is fitted for reflecting heat wave the quartz tube heater 10 generates at the center part of the oven room 6. Moreover, the quartz tube heater 10 and the reflective body 11 are integrally fitted inside the oven room 6 in free insertion and removal into and from a face of the oven room 6. In addition, the quartz tube heater 10 is provided with an alumina heater and a quartz tube covering it. COPYRIGHT: (C)2003,JPO |
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