METHOD AND APPARATUS FOR DIVIDING BASE PLATE
PROBLEM TO BE SOLVED: To provide a base plate dividing method capable of eliminating trouble such as breakage or cracking or the like in a base plate at the time of division to enhance a yield. SOLUTION: The base plate dividing method for dividing the base plate after alignment includes a process (a...
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Zusammenfassung: | PROBLEM TO BE SOLVED: To provide a base plate dividing method capable of eliminating trouble such as breakage or cracking or the like in a base plate at the time of division to enhance a yield. SOLUTION: The base plate dividing method for dividing the base plate after alignment includes a process (a) for feeding the base plate onto a table for sucking and holding the base plate, a process (b) for allowing the alignment members arranged to four sides of the base plate to advance and pressing the four side ends of the base plate to perform the alignment of the base plate, a process (c) for sucking the base plate to the table after the completion of the alignment of the base plate, a process (d) for scribing the base plate along a dividing scheduled line, a process (e) for allowing all of the alignment members to retreat, a process (f) for dividing the base plate along the dividing scheduled line, and a process (g) for feeding out the divided base plates. COPYRIGHT: (C)2003,JPO |
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