GAS LASER DEVICE

PROBLEM TO BE SOLVED: To equally generate discharges between a pair of electrodes of a gas laser device. SOLUTION: The gas laser device is provided with a pair of electrodes 2 and 3 extended in a lengthwise direction of an optical resonator, applies a pulse voltage to the pair of the electrodes 2 and 3, and performs laser oscillation by the discharges generated between the pair of the electrodes. Feeders 21 and 22 applying the pulse voltage to the pair of the electrodes 2 and 3 are connected so as to apply the pulse voltage at a position localized in the lengthwise direction of the resonator. An interval in an electric field direction between the pair of the electrodes 2 and 3 is set so as to be wider at a position of a larger potential difference corresponding to a potential difference distribution in the lengthwise direction of the pair of the electrodes 2 and 3 at the time of applying the pulse voltage. COPYRIGHT: (C)2003,JPO