SCANNING ELECTRON MICROSCOPE

PROBLEM TO BE SOLVED: To provide a scanning electron microscope by which an X-ray analysis of a thin film testpiece can be accurately performed. SOLUTION: In the scanning electron microscope, a characteristic X-ray 9 generated in the testpiece when an electron beam 3 from an electron beam source 1 i...

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Bibliographische Detailangaben

Hauptverfasser:	ISHIKAWA SUMIYO, ARAI SHIGETOSHI
Format:	Patent
Sprache:	eng
Schlagworte:	BASIC ELECTRIC ELEMENTS ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS ELECTRICITY INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIRCHEMICAL OR PHYSICAL PROPERTIES MEASURING PHYSICS TESTING
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