SCANNING ELECTRON MICROSCOPE

SCANNING ELECTRON MICROSCOPE

PROBLEM TO BE SOLVED: To provide a scanning electron microscope by which an X-ray analysis of a thin film testpiece can be accurately performed. SOLUTION: In the scanning electron microscope, a characteristic X-ray 9 generated in the testpiece when an electron beam 3 from an electron beam source 1 i...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser: ISHIKAWA SUMIYO, ARAI SHIGETOSHI
Format: Patent
Sprache:eng
Schlagworte:
BASIC ELECTRIC ELEMENTS
ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
ELECTRICITY
INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIRCHEMICAL OR PHYSICAL PROPERTIES
MEASURING
PHYSICS
TESTING
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Beschreibung
Zusammenfassung:PROBLEM TO BE SOLVED: To provide a scanning electron microscope by which an X-ray analysis of a thin film testpiece can be accurately performed. SOLUTION: In the scanning electron microscope, a characteristic X-ray 9 generated in the testpiece when an electron beam 3 from an electron beam source 1 is irradiated to the testpiece 5 is detected by an X-ray detector 8. The X-ray detector is disposed at a lower face side of the testpiece 5 to detect the characteristic X-ray 9 emitted from the lower face side of the testpiece 5. COPYRIGHT: (C)2003,JPO