SCANNING ELECTRON MICROSCOPE
PROBLEM TO BE SOLVED: To provide a scanning electron microscope by which an X-ray analysis of a thin film testpiece can be accurately performed. SOLUTION: In the scanning electron microscope, a characteristic X-ray 9 generated in the testpiece when an electron beam 3 from an electron beam source 1 i...
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| creator | ISHIKAWA SUMIYO ARAI SHIGETOSHI |
| description | PROBLEM TO BE SOLVED: To provide a scanning electron microscope by which an X-ray analysis of a thin film testpiece can be accurately performed. SOLUTION: In the scanning electron microscope, a characteristic X-ray 9 generated in the testpiece when an electron beam 3 from an electron beam source 1 is irradiated to the testpiece 5 is detected by an X-ray detector 8. The X-ray detector is disposed at a lower face side of the testpiece 5 to detect the characteristic X-ray 9 emitted from the lower face side of the testpiece 5. COPYRIGHT: (C)2003,JPO |
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COPYRIGHT: (C)2003,JPO</description><edition>7</edition><language>eng</language><subject>BASIC ELECTRIC ELEMENTS ; ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS ; ELECTRICITY ; INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIRCHEMICAL OR PHYSICAL PROPERTIES ; MEASURING ; PHYSICS ; TESTING</subject><creationdate>2003</creationdate><oa>free_for_read</oa><woscitedreferencessubscribed>false</woscitedreferencessubscribed></display><links><openurl>$$Topenurl_article</openurl><openurlfulltext>$$Topenurlfull_article</openurlfulltext><thumbnail>$$Tsyndetics_thumb_exl</thumbnail><linktohtml>$$Uhttps://worldwide.espacenet.com/publicationDetails/biblio?FT=D&date=20030606&DB=EPODOC&CC=JP&NR=2003162971A$$EHTML$$P50$$Gepo$$Hfree_for_read</linktohtml><link.rule.ids>230,308,780,885,25564,76547</link.rule.ids><linktorsrc>$$Uhttps://worldwide.espacenet.com/publicationDetails/biblio?FT=D&date=20030606&DB=EPODOC&CC=JP&NR=2003162971A$$EView_record_in_European_Patent_Office$$FView_record_in_$$GEuropean_Patent_Office$$Hfree_for_read</linktorsrc></links><search><creatorcontrib>ISHIKAWA SUMIYO</creatorcontrib><creatorcontrib>ARAI SHIGETOSHI</creatorcontrib><title>SCANNING ELECTRON MICROSCOPE</title><description>PROBLEM TO BE SOLVED: To provide a scanning electron microscope by which an X-ray analysis of a thin film testpiece can be accurately performed. 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| subjects | BASIC ELECTRIC ELEMENTS ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS ELECTRICITY INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIRCHEMICAL OR PHYSICAL PROPERTIES MEASURING PHYSICS TESTING |
| title | SCANNING ELECTRON MICROSCOPE |
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