SURFACE TREATMENT METHOD BY LIQUID PHASE

PROBLEM TO BE SOLVED: To prevent the occurrence of the deficiency of a film even to a fine pore or a fine structure in the material to be treated, and to form a uniform film. SOLUTION: For the purpose of forming a film 3 on the inside face 2a of a fine pore or a fine structure in the material 2 to b...

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Bibliographische Detailangaben
Hauptverfasser: TEI YOUHO, AKIMOTO KYOICHI
Format: Patent
Sprache:eng
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Zusammenfassung:PROBLEM TO BE SOLVED: To prevent the occurrence of the deficiency of a film even to a fine pore or a fine structure in the material to be treated, and to form a uniform film. SOLUTION: For the purpose of forming a film 3 on the inside face 2a of a fine pore or a fine structure in the material 2 to be treated, the pressure in a sealed chamber is made into an evacuated state of