SURFACE TREATMENT METHOD BY LIQUID PHASE
PROBLEM TO BE SOLVED: To prevent the occurrence of the deficiency of a film even to a fine pore or a fine structure in the material to be treated, and to form a uniform film. SOLUTION: For the purpose of forming a film 3 on the inside face 2a of a fine pore or a fine structure in the material 2 to b...
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Zusammenfassung: | PROBLEM TO BE SOLVED: To prevent the occurrence of the deficiency of a film even to a fine pore or a fine structure in the material to be treated, and to form a uniform film. SOLUTION: For the purpose of forming a film 3 on the inside face 2a of a fine pore or a fine structure in the material 2 to be treated, the pressure in a sealed chamber is made into an evacuated state of |
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