ULTRAVIOLET LASER APPARATUS

ULTRAVIOLET LASER APPARATUS

PROBLEM TO BE SOLVED: To provide a laser apparatus that prevents air from entering a light path, and at the same time can efficiently discharge air that has entered. SOLUTION: The ultraviolet laser apparatus for oscillating a laser beam (21) having an ultraviolet wavelength has purge gas pipes (56A...

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Bibliographische Detailangaben
1. Verfasser: RAKUISHI YOSHINORI
Format: Patent
Sprache:eng
Schlagworte:
BASIC ELECTRIC ELEMENTS
DEVICES USING STIMULATED EMISSION
ELECTRICITY
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Beschreibung
Zusammenfassung:PROBLEM TO BE SOLVED: To provide a laser apparatus that prevents air from entering a light path, and at the same time can efficiently discharge air that has entered. SOLUTION: The ultraviolet laser apparatus for oscillating a laser beam (21) having an ultraviolet wavelength has purge gas pipes (56A to 56C) that inject a low-reactive purge gas without containing oxygen into light path space (72A to 72C) where the laser beam (21) passes, and are made of stainless steel, and connects the piles by welding or a metal-sealing.