CENTERING AND CLEANING MECHANISM FOR PROCESSING APPARATUS AND GRINDING APPARATUS EQUIPPED WITH CENTERING AND CLEANING MECHANISM

PROBLEM TO BE SOLVED: To provide a centering and cleaning mechanism provided with functions to match the center of an object to be processed and to clean it, and a grinding apparatus provided with the centering and cleaning functions. SOLUTION: The centering and cleaning mechanism comprises a center...

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Bibliographische Detailangaben
1. Verfasser:	SATO KICHIZO
Format:	Patent
Sprache:	eng
Schlagworte:	BASIC ELECTRIC ELEMENTS DRESSING OR CONDITIONING OF ABRADING SURFACES ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS GRINDING MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING PERFORMING OPERATIONS POLISHING SEMICONDUCTOR DEVICES TRANSPORTING
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Beschreibung
Zusammenfassung:	PROBLEM TO BE SOLVED: To provide a centering and cleaning mechanism provided with functions to match the center of an object to be processed and to clean it, and a grinding apparatus provided with the centering and cleaning functions. SOLUTION: The centering and cleaning mechanism comprises a center table for placing an object to be processed, a centering means for acting on and centering a peripheral edge of the object placed on the center table, an absorption means for applying negative pressure to the center table, a rotation driving means for rotation-driving the center table, and a washing water supply means for supplying washing water to the object held on the center table.