APPARATUS FOR CONTROLLING AUTOMATIC INTRODUCTION OF MgO SOURCE
PROBLEM TO BE SOLVED: To simply and automatically set the input of an MgO source at vapor deposition. SOLUTION: An apparatus has an MgO source-stocker 1, piping 2 with one end connected to stocker 1, which supplies the MgO source by gravity, a casing 3 which discharges the supplied MgO source by a r...
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Zusammenfassung: | PROBLEM TO BE SOLVED: To simply and automatically set the input of an MgO source at vapor deposition. SOLUTION: An apparatus has an MgO source-stocker 1, piping 2 with one end connected to stocker 1, which supplies the MgO source by gravity, a casing 3 which discharges the supplied MgO source by a rotating body 4 located therein from a hole of a predetermined width formed at its bottom, and a scraper 7 on which diffusion-inhibiting plates 6 inhibiting the diffusion of the MgO source are formed at both ends. The rotating body 4 has a plurality of blades 5 fixed at regular intervals at its periphery and stores the supplied MgO source within a space surrounded by the rotating body 4, two blades 5 and the inner surface of the casing 3. The gaps between the inner wall of the casing 3 and the blades 5 are smaller then the individual sizes of the MgO sources in the upper part of the casing 3 above the points where the blades 5 reach horizontal states, and are larger than the individual diameters of the MgO sources in the lower part of the casing 3. |
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