METHOD FOR MANUFACTURING SEMICONDUCTOR ELEMENT

PROBLEM TO BE SOLVED: To provide a method for manufacturing a semiconductor element appropriate for an ultrahigh integrated semiconductor element, which enables the formation of an excellent contact plug. SOLUTION: The method comprises a step for forming an insulating film 29 on a silicon substrate...

Ausführliche Beschreibung

Bibliographische Detailangaben

1. Verfasser:	TEI YUSEKI
Format:	Patent
Sprache:	eng
Schlagworte:	BASIC ELECTRIC ELEMENTS ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY SEMICONDUCTOR DEVICES
Online-Zugang:	Volltext bestellen
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