WET PROCESSING EQUIPMENT AND TRANSPORT METHOD

PROBLEM TO BE SOLVED: To provide wet processing equipment and a transport method wherein damage to a transport roller is little, the transfer of contamination to a back of a substrate which is caused by damage to equipment is reduced and the frequency of component exchange is reduced, so that substr...

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Bibliographische Detailangaben
1. Verfasser:	NISHIMURA SUKEYUKI
Format:	Patent
Sprache:	eng
Schlagworte:	BASIC ELECTRIC ELEMENTS CHEMICAL COMPOSITION OF GLASSES, GLAZES, OR VITREOUSENAMELS CHEMISTRY CLEANING CLEANING IN GENERAL CONVEYING DEVICES OR ARRANGEMENTS, THE OPTICAL OPERATION OF WHICH ISMODIFIED BY CHANGING THE OPTICAL PROPERTIES OF THE MEDIUM OF THEDEVICES OR ARRANGEMENTS FOR THE CONTROL OF THE INTENSITY,COLOUR, PHASE, POLARISATION OR DIRECTION OF LIGHT, e.g.SWITCHING, GATING, MODULATING OR DEMODULATING ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY FREQUENCY-CHANGING GLASS HANDLING THIN OR FILAMENTARY MATERIAL JOINING GLASS TO GLASS OR OTHER MATERIALS METALLURGY MINERAL OR SLAG WOOL NON-LINEAR OPTICS OPTICAL ANALOGUE/DIGITAL CONVERTERS OPTICAL LOGIC ELEMENTS OPTICS PACKING PERFORMING OPERATIONS PHYSICS PNEUMATIC TUBE CONVEYORS PREVENTION OF FOULING IN GENERAL SEMICONDUCTOR DEVICES SHOP CONVEYOR SYSTEMS STORING SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS,MINERALS OR SLAGS SURFACE TREATMENT OF GLASS TECHNIQUES OR PROCEDURES FOR THE OPERATION THEREOF TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING ORTIPPING TRANSPORTING
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Beschreibung
Zusammenfassung:	PROBLEM TO BE SOLVED: To provide wet processing equipment and a transport method wherein damage to a transport roller is little, the transfer of contamination to a back of a substrate which is caused by damage to equipment is reduced and the frequency of component exchange is reduced, so that substrates different in sizes can be processed at a low running cost. SOLUTION: This wet processing equipment is provided with a wet processing area, a dry area and a roller conveyer which transports works to the wet processing area and the dry area by sheet system. The roller conveyer in the wet processing area is provided with cylindrical rollers, and the roller conveyer in the dry area is provided with disk rollers constituted of shafts and a plurality of disk-shaped members which are arranged in the axial direction of the shafts.