PROCESS ADVANCE GRASPING APPARATUS AND PROCESSING APPARATUS OF PHOTOMASK PATTERN DATA FOR DRAWING APPARATUS
PROBLEM TO BE SOLVED: To provide an apparatus that can grasp the condition of process advance by displaying a process advance grasp window when carrying out specific processing to photomask pattern data for a drawing apparatus. SOLUTION: In the processing apparatus of photomask pattern data for a dr...
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Zusammenfassung: | PROBLEM TO BE SOLVED: To provide an apparatus that can grasp the condition of process advance by displaying a process advance grasp window when carrying out specific processing to photomask pattern data for a drawing apparatus. SOLUTION: In the processing apparatus of photomask pattern data for a drawing apparatus, the process advance grasp apparatus has a display means, a process state grasp section, and a display management section. At the process stage grasp section, the throughput of the pattern data of each unit, entire throughput where they are added and the like are grasped based on the seek address of data. At the same time, the advance state of the processing of the pattern data of the unit from each processing section is grasped. At the display management section, information on the process advance state of the entire photomask pattern data for the drawing apparatus is grasped based on the information on the process advance state of the pattern data of the grasped unit, and at the same time the display of the process advance state is instructed to the process advance grasp window after each specific time based on the information on the process advance state. |
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