ABSORPTION LAYER FORMING METHOD FOR OPTICAL ELEMENT ANALYSIS, OPTICAL ELEMENT ANALYZING METHOD, PROGRAM FOR FORMING ABSORPTION LAYER FOR OPTICAL ELEMENT ANALYSIS, AND OPTICAL ELEMENT ANALYZING PROGRAM

PROBLEM TO BE SOLVED: To make analyzable the behavior of an electromagnetic wave made incident on an optical element having no periodic structure with high accuracy and a small calculation quantity by using RCWA (rigorous coupled-wave analysis) for analyzing the behavior of an electromagnetic wave m...

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Bibliographische Detailangaben

Hauptverfasser:	WELLNER KLAUS, KODATE KASHIKO
Format:	Patent
Sprache:	eng
Schlagworte:	OPTICAL ELEMENTS, SYSTEMS, OR APPARATUS OPTICS PHYSICS
Online-Zugang:	Volltext bestellen
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