SUBSTRATE PROCESSING DEVICE

PROBLEM TO BE SOLVED: To provide such a substrate processing device that does not result in an increase in cost and reduction of throughput and reliability due to complicated structure and operation by allowing a substrate housing container holding means not to block the access of a substrate housing container transfer means to a substrate housing container. SOLUTION: This substrate processing device is provided with a substrate housing container holding means 3 that holds a substrate housing container 1 at a specified position of a load port 2 or the like, and the substrate housing container holding means 3 is comprised of a holding part 4 arranged outside the substrate housing container 1, an air cylinder 5 to move vertically the holding part 4, and a rotating means for the holding part 4.