APPARATUS AND METHOD FOR MANUFACTURING ORGANIC EL ELEMENT

PROBLEM TO BE SOLVED: To provide an apparatus and a method for manufacturing an organic EL element with excellent productivity even with the organic EL element (panel) ready for a display of relatively wide area. SOLUTION: A laser unit 130 with an optical fiber to emit the laser beam fixed thereto i...

Ausführliche Beschreibung

Gespeichert in:

Bibliographische Detailangaben
1. Verfasser:	HAKU HISAO
Format:	Patent
Sprache:	eng
Schlagworte:	BASIC ELECTRIC ELEMENTS CHEMICAL SURFACE TREATMENT CHEMISTRY COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATIONOR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY IONIMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL COATING MATERIAL WITH METALLIC MATERIAL COATING METALLIC MATERIAL DIFFUSION TREATMENT OF METALLIC MATERIAL ELECTRIC HEATING ELECTRIC LIGHTING NOT OTHERWISE PROVIDED FOR ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR ELECTRICITY INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION INGENERAL METALLURGY SEMICONDUCTOR DEVICES SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THESURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION
Online-Zugang:	Volltext bestellen
Tags:	Tag hinzufügen Keine Tags, Fügen Sie den ersten Tag hinzu!

Beschreibung
Zusammenfassung:	PROBLEM TO BE SOLVED: To provide an apparatus and a method for manufacturing an organic EL element with excellent productivity even with the organic EL element (panel) ready for a display of relatively wide area. SOLUTION: A laser unit 130 with an optical fiber to emit the laser beam fixed thereto is disposed on a stage movable in the x-y direction, and placed in a vacuum chamber. In the chamber, a substrate holder is located at the position where a vapor deposition material 115 is sublimed by the laser beam irradiation. An electroluminescence layer is formed by using this apparatus by partially subliming the vapor deposition material by the laser beam, and performing the vapor deposition on the substrate side via a mask with a vapor deposition window arranged in a predetermined pattern.