METHOD FOR REFINING SILICON TETRAFLUORIDE

METHOD FOR REFINING SILICON TETRAFLUORIDE

PROBLEM TO BE SOLVED: To provide a method for refining high purity silicon tetrafluoride used in the electronics field, the optical field, and the like. SOLUTION: When silicon tetrafluoride is produced by reacting silicon with hydrogen fluoride, a container in which silicon tetrafluoride has been so...

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Bibliographische Detailangaben
Hauptverfasser: ITO HISAKAZU, NAKAGAWA SHINSUKE, SHIBAYAMA SHIGERO, RIYOUKAWA ATSUSHI
Format: Patent
Sprache:eng
Schlagworte:
CHEMISTRY
COMPOUNDS THEREOF
INORGANIC CHEMISTRY
METALLURGY
NON-METALLIC ELEMENTS
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Zusammenfassung:PROBLEM TO BE SOLVED: To provide a method for refining high purity silicon tetrafluoride used in the electronics field, the optical field, and the like. SOLUTION: When silicon tetrafluoride is produced by reacting silicon with hydrogen fluoride, a container in which silicon tetrafluoride has been solidified is filled with gaseous helium under >=10 kPa pressure and then evacuated to