SEMICONDUCTOR DEVICE
PROBLEM TO BE SOLVED: To realize a large-output high-frequency circuit which is superior in impedance matching and small in a resistance loss in a semiconductor device, equipped with a SAW device on a semiconductor chip. SOLUTION: A passive element chip 2 is formed with a passive element circuit 4,...
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Sprache: | eng |
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Zusammenfassung: | PROBLEM TO BE SOLVED: To realize a large-output high-frequency circuit which is superior in impedance matching and small in a resistance loss in a semiconductor device, equipped with a SAW device on a semiconductor chip. SOLUTION: A passive element chip 2 is formed with a passive element circuit 4, which includes a transmission line 4c on an upper surface of a semi- insulating compound semiconductor substrate 2a having a lower surface thereof as a grounding potential 2b. A SAW device chip 3 is equipped on the passive element chip 2. Even if the width of the transmission line 4c is increased, high characteristic impedance can be maintained, by increasing a thickness of the substrate 2a. As the result, the resistance of the transmission line can be reduced and the SAW device can be matched easily. |
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