LOAD PORT
PROBLEM TO BE SOLVED: To provide a load port in which the key of a pod opener can be engaged smoothly with the keyhole of a wafer carrier. SOLUTION: In the load port 2 which becomes an interface when wafers are supplied to a semiconductor processing device 3, a sliding mechanism which slides in the...
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Zusammenfassung: | PROBLEM TO BE SOLVED: To provide a load port in which the key of a pod opener can be engaged smoothly with the keyhole of a wafer carrier. SOLUTION: In the load port 2 which becomes an interface when wafers are supplied to a semiconductor processing device 3, a sliding mechanism which slides in the direction perpendicular to a carrier transporting direction is provided on a carrier base CB which transports a carrier housing wafers toward the pod opener 22 which automatically opens/closes the carrier. When the installed position of the latchkey LK of the pod opener 22 and that of the keyhole of the carrier is finely deviated from each other, the carrier base CB adjusts the position of the keyhole by sliding in the direction perpendicular to the carrier transporting direction. Consequently, the latchkey LK is appropriately engaged with the keyhole. |
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