LOW-TEMPERATURE AEROSOL CLEANING METHOD AND SYSTEM
PROBLEM TO BE SOLVED: To ensure efficient cleaning by reducing the consumption of argon gas. SOLUTION: When an article 10 being cleaned is cleaned by blowing cooled cleaning gas from a nozzle 20, thereby bringing aerosol 24 into collision against the article 10, a cleaning gas cooled through one coo...
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| creator | SONODA YUZURU |
| description | PROBLEM TO BE SOLVED: To ensure efficient cleaning by reducing the consumption of argon gas. SOLUTION: When an article 10 being cleaned is cleaned by blowing cooled cleaning gas from a nozzle 20, thereby bringing aerosol 24 into collision against the article 10, a cleaning gas cooled through one cooling system (38) is supplied alternately to a plurality of cleaning chambers 42A and 42B, thus cleaning the article 10 alternately in respective cleaning chambers. |
| format | Patent |
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SOLUTION: When an article 10 being cleaned is cleaned by blowing cooled cleaning gas from a nozzle 20, thereby bringing aerosol 24 into collision against the article 10, a cleaning gas cooled through one cooling system (38) is supplied alternately to a plurality of cleaning chambers 42A and 42B, thus cleaning the article 10 alternately in respective cleaning chambers.</description><edition>7</edition><language>eng</language><subject>APPLYING LIQUIDS OR OTHER FLUENT MATERIALS TO SURFACES, IN GENERAL ; ATOMISING APPARATUS ; BASIC ELECTRIC ELEMENTS ; CLEANING ; CLEANING IN GENERAL ; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ; ELECTRICITY ; NOZZLES ; PERFORMING OPERATIONS ; PREVENTION OF FOULING IN GENERAL ; SEMICONDUCTOR DEVICES ; SPRAYING APPARATUS ; SPRAYING OR ATOMISING IN GENERAL ; TRANSPORTING</subject><creationdate>2003</creationdate><oa>free_for_read</oa><woscitedreferencessubscribed>false</woscitedreferencessubscribed></display><links><openurl>$$Topenurl_article</openurl><openurlfulltext>$$Topenurlfull_article</openurlfulltext><thumbnail>$$Tsyndetics_thumb_exl</thumbnail><linktohtml>$$Uhttps://worldwide.espacenet.com/publicationDetails/biblio?FT=D&date=20030228&DB=EPODOC&CC=JP&NR=2003059889A$$EHTML$$P50$$Gepo$$Hfree_for_read</linktohtml><link.rule.ids>230,308,776,881,25542,76290</link.rule.ids><linktorsrc>$$Uhttps://worldwide.espacenet.com/publicationDetails/biblio?FT=D&date=20030228&DB=EPODOC&CC=JP&NR=2003059889A$$EView_record_in_European_Patent_Office$$FView_record_in_$$GEuropean_Patent_Office$$Hfree_for_read</linktorsrc></links><search><creatorcontrib>SONODA YUZURU</creatorcontrib><title>LOW-TEMPERATURE AEROSOL CLEANING METHOD AND SYSTEM</title><description>PROBLEM TO BE SOLVED: To ensure efficient cleaning by reducing the consumption of argon gas. 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SOLUTION: When an article 10 being cleaned is cleaned by blowing cooled cleaning gas from a nozzle 20, thereby bringing aerosol 24 into collision against the article 10, a cleaning gas cooled through one cooling system (38) is supplied alternately to a plurality of cleaning chambers 42A and 42B, thus cleaning the article 10 alternately in respective cleaning chambers.</abstract><edition>7</edition><oa>free_for_read</oa></addata></record> |
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| subjects | APPLYING LIQUIDS OR OTHER FLUENT MATERIALS TO SURFACES, IN GENERAL ATOMISING APPARATUS BASIC ELECTRIC ELEMENTS CLEANING CLEANING IN GENERAL ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY NOZZLES PERFORMING OPERATIONS PREVENTION OF FOULING IN GENERAL SEMICONDUCTOR DEVICES SPRAYING APPARATUS SPRAYING OR ATOMISING IN GENERAL TRANSPORTING |
| title | LOW-TEMPERATURE AEROSOL CLEANING METHOD AND SYSTEM |
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